Aluminum Nitride Heater

Aluminum Nitride Heater

Aluminum Nitride Heater

  • Purity: 95%-99%
  • Custom sizes and standard sizes in stock
  • Quick Lead Time
  • Competitive Price

Aluminum Nitride Heater is a high-performance heating element with exceptional thermal conductivity and high-temperature resistance. It is widely applied in semiconductor manufacturing, industrial heat treatment, medical devices, and scientific research. As a leading supplier and manufacturer of premium alumina products, Shanghai Yuepeng can supply high-quality aluminum nitride heaters with various specifications and competitive prices, offering customized solutions to meet specific requirements.

Aluminum Nitride Heater Data Sheet

Reference Code:HM1916
Purity:95%-99%
Density:3.32 g/cm3
Appearance:Dark Gray / Light Gray / Beige
Thickness:0.8-3.0 mm
Dimensions:Customized
Maximum Working Temperature:500℃
Maximum Watt Density:155 W/cm2
Heating Line Resistance Tolerance:±20%
Heating Speed:150℃/s
TCR:0.0015±0.0003

Aluminum Nitride Heater Description

Aluminum Nitride (AlN) Heat Sink is made of high-purity aluminum nitride ceramic. It delivers fast, uniform heating in extreme conditions (above 2000℃) while offering excellent thermal shock resistance and electrical insulation. It is ideal for applications requiring fast response or high levels of uniform temperatures. Shanghai Yuepeng can provide bulk molding and custom single-piece options to meet diverse industrial and research requirements, offering flexible and rapid customization of product size and scale.

Aluminum Nitride Heater Advantages

  • Capable of withstanding high temperatures up to 1000°C.
  • Exceptional thermal conductivity (170-220 W/m·K) and uniform heat distribution.
  • Hard, dense, non-porous substrate with high purity.
  • Superior resistance to moisture and chemicals.
  • Excellent flexibility in size and shape customization.
  • Precise and repeatable patterning with evenly distributed wattage.
  • Excellent dielectric properties
  • Low coefficient of thermal expansion
  • Low mass: fast temperature ramp-up and cool-down
  • Low leakage current
  • No outgassing with inorganic systems

Aluminum Nitride Heater Applications

  • Semiconductor Processing Equipment: Aluminum nitride heaters provide uniform heating for wafer processing, diffusion, and CVD systems due to their high thermal conductivity and low thermal expansion.
  • LED Manufacturing: Used to maintain precise temperatures during LED epitaxy and packaging, ensuring stable performance and high product yield.
  • Vacuum and Plasma Systems: Their thermal stability and low outgassing make them reliable in vacuum chambers and plasma processing tools.
  • Medical and Laboratory Devices: Applied in diagnostic instruments, thermal analysis, and controlled heating environments requiring fast response and clean operation.
  • Electrostatic Chucks (ESCs): Integrated into AlN electrostatic chucks to provide uniform wafer heating during etching and deposition processes.

Aluminum Nitride Material Properties

PropertyUnitHMAN1000HMAN2000HMAN3000HMAN4000HMAN1000S
Densityg/cm33.323.323.323.303.30
Young’s ModulusGPa 300-350300-350300-350300-350350
Fracture Toughness KICMPa m1/23332.53
Poisson’s Ratio 0.220.220.220.220.22
Compressive StrengthMPa30003000300030003000
Flexural Strength @ 25°CMPa350350350350350
HardnessGPa1010101211

PropertyUnitHMAN1000HMAN2000HMAN3000HMAN4000HMAN1000S
Thermal Conductivity @ 25°CW/mK170200230200170
CTE 25°C ➞ 400°C10-6/K4.54.54.53.54.6
Max Temperature (Air)°C12001200120012001200
Max Temperature (Inert)°C12001200120012001200

PropertyUnitHMAN1000HMAN2000HMAN3000HMAN4000HMAN1000S
Dielectric Constant1 MHz8.88.88.58.58.8
Dielectric Loss1 MHz5×10-45×10-45×10-45×10-45×10-4
Dielectric Strength DC @ 25°CkV/mm1515151514
Volume Resistivity @ 25°Cohm-cm >1013>1013>1013 >1014 >1014

Aluminum Nitride Material Grades

HMAN1000 is our standard high purity aluminium nitride with a thermal conductivity of 170 W/mK. This is the same thermal performance as our substrate material but offers the possibility of larger pieces in length/width and in thicknesses up to 30mm.
HMAN1000 has good coefficient of thermal expansion – matched to silicon and gallium nitride over wide temperature ranges.

HMAN100 Applications:

  • High power insulators
  • Laser components
  • Water cooled heatsinks
  • Power electronics
  • Aerospace, medical and semiconductor components

HMAN1000S 170 W/mK is our standard high thermal conductivity substrate material, However, other high-performance grades are also available.

HMAN1000S Applications:

  • Heat sinks
  • Heat spreaders
  • Laser heatsinks power rectifiers
  • Aerospace, power electronics, rectifiers

HMAN2000 is one of our enhanced grades of aluminium nitride, offering all the mechanical performance of HMAN1000 with the enhanced benefits of 200 W/mK thermal conductance.

HMAN2000 Applications:

  • Heat sinks
  • Heat spreaders
  • Laser heatsinks power rectifiers
  • Aerospace, power electronics, rectifiers

HMAN3000 is one of our enhanced grades of aluminium nitride offering, all the mechanical performance of HMAN1000 with the enhanced benefits of 230 W/mK thermal conductance.

HMAN3000 Applications:

  • Heat sinks
  • Heat spreaders
  • Laser heatsinks power rectifiers
  • Aerospace, power electronics, rectifiers

HMAN4000 is one of our enhanced grades of aluminium nitride offering, all the mechanical performance of HMAN1000 with the enhanced benefits of 200 W/mK thermal conductance.

HMAN4000 Applications:

  • Heat sinks
  • Heat spreaders
  • Laser heatsinks power rectifiers
  • Aerospace, power electronics, rectifiers

Aluminum Nitride Ceramic Machining

Aluminum Nitride Ceramic Machining

Aluminum Nitride (AlN) ceramic machining is a precise process used to fabricate high-performance components from aluminum nitride materials. Machining aluminum nitride ceramics requires specialized equipment and techniques to handle their brittleness and hardness. Proper tooling and controlled environments are essential to avoid material damage and achieve the desired surface finish and dimensional accuracy. The common machining methods are as follows:

  • Diamond Cutting: Diamond tools are used to achieve fine precision and smooth surface finishes, ideal for complex shapes.
  • Laser Cutting: A non-contact method used for intricate shapes, with high precision and minimal thermal impact.
  • Precision Grinding: Utilized to achieve fine tolerances and surface finishes. Requires special care to prevent cracking or chipping due to the ceramic’s brittleness.
  • Wire EDM (Electrical Discharge Machining): A method often used for intricate cutting, especially for thin and complex geometries.

Aluminum Nitride Ceramic Packaging

Aluminum Nitride Ceramic products are typically packaged in vacuum-sealed bags to prevent moisture or contamination and wrapped with foam to cushion vibrations and impacts during transport, ensuring the quality of products in their original condition.

ceramic packing

Get A Quote

We will check and get back to you in 24 hours.

To customize your aluminum nitride heater, please provide the following details:

  1. Dimensions: Length, Width, Diameter, Thickness, etc.
  2. Tolerances: Specify the required tolerances.
  3. Purity of the material
  4. Operating Conditions: Output, voltage, temperature, heating performance, etc.
  5. Shapes: Any specific shape or configuration preferences for your heating element.
  6. Bonding Materials: Whether to bond to metals, specify the materials.
  7. Surface Finishes: Polished, rough, etc.
  8. Quantity of the products you need
  9. Alternatively, you can provide a drawing with your specifications.

Once we have these details, we can provide you with a quote within 24 hours.details, we can provide you with a quote within 24 hours.

We carry a wide variety of aluminum nitride products in stock, and for these, there is generally no minimum order requirement. However, for custom orders, we typically set a minimum order value of $200. The lead time for stock items is usually 1-2 weeks, while custom orders usually take 3-4 weeks, depending on the specifics of the order.

Their high thermal conductivity and precise temperature control make them essential for wafer processing, LED epitaxy, and thin-film deposition, where consistent heating is critical for product quality.

Yes, they exhibit very low outgassing and excellent chemical resistance, making them reliable in vacuum chambers, plasma systems, and clean manufacturing environments.

Shanghai Yuepeng Tech, established in 2022 in Shanghai, China, is a specialized supplier and manufacturer of aluminum nitride products. With extensive expertise in supply and export, we offer competitive pricing and customized solutions tailored to specific requirements, ensuring outstanding quality and customer satisfaction. As a professional provider of refractory metals, specialty alloys, spherical powders, and various advanced materials, we serve the research, development, and large-scale industrial production needs of the scientific and industrial sectors.

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