Aluminum Nitride Heater
Aluminum Nitride Heater
- Purity: 95%-99%
- Custom sizes and standard sizes in stock
- Quick Lead Time
- Competitive Price
Aluminum Nitride Heater is a high-performance heating element with exceptional thermal conductivity and high-temperature resistance. It is widely applied in semiconductor manufacturing, industrial heat treatment, medical devices, and scientific research. As a leading supplier and manufacturer of premium alumina products, Shanghai Yuepeng can supply high-quality aluminum nitride heaters with various specifications and competitive prices, offering customized solutions to meet specific requirements.
Aluminum Nitride Heater Data Sheet
Reference Code: | HM1916 |
Purity: | 95%-99% |
Density: | 3.32 g/cm3 |
Appearance: | Dark Gray / Light Gray / Beige |
Thickness: | 0.8-3.0 mm |
Dimensions: | Customized |
Maximum Working Temperature: | 500℃ |
Maximum Watt Density: | 155 W/cm2 |
Heating Line Resistance Tolerance: | ±20% |
Heating Speed: | 150℃/s |
TCR: | 0.0015±0.0003 |
Aluminum Nitride Heater Description
Aluminum Nitride (AlN) Heat Sink is made of high-purity aluminum nitride ceramic. It delivers fast, uniform heating in extreme conditions (above 2000℃) while offering excellent thermal shock resistance and electrical insulation. It is ideal for applications requiring fast response or high levels of uniform temperatures. Shanghai Yuepeng can provide bulk molding and custom single-piece options to meet diverse industrial and research requirements, offering flexible and rapid customization of product size and scale.
Aluminum Nitride Heater Advantages
- Capable of withstanding high temperatures up to 1000°C.
- Exceptional thermal conductivity (170-220 W/m·K) and uniform heat distribution.
- Hard, dense, non-porous substrate with high purity.
- Superior resistance to moisture and chemicals.
- Excellent flexibility in size and shape customization.
- Precise and repeatable patterning with evenly distributed wattage.
- Excellent dielectric properties
- Low coefficient of thermal expansion
- Low mass: fast temperature ramp-up and cool-down
- Low leakage current
- No outgassing with inorganic systems
Aluminum Nitride Heater Applications
- Semiconductor Processing Equipment: Aluminum nitride heaters provide uniform heating for wafer processing, diffusion, and CVD systems due to their high thermal conductivity and low thermal expansion.
- LED Manufacturing: Used to maintain precise temperatures during LED epitaxy and packaging, ensuring stable performance and high product yield.
- Vacuum and Plasma Systems: Their thermal stability and low outgassing make them reliable in vacuum chambers and plasma processing tools.
- Medical and Laboratory Devices: Applied in diagnostic instruments, thermal analysis, and controlled heating environments requiring fast response and clean operation.
- Electrostatic Chucks (ESCs): Integrated into AlN electrostatic chucks to provide uniform wafer heating during etching and deposition processes.
- Semiconductor Thin Films
- LED and Optoelectronics
- Power Electronics
- Vacuum and Plasma Systems
- Medical Devices
Aluminum Nitride Material Properties
Aluminum Nitride Material Grades
HMAN1000 is our standard high purity aluminium nitride with a thermal conductivity of 170 W/mK. This is the same thermal performance as our substrate material but offers the possibility of larger pieces in length/width and in thicknesses up to 30mm.
HMAN1000 has good coefficient of thermal expansion – matched to silicon and gallium nitride over wide temperature ranges.
HMAN100 Applications:
- High power insulators
- Laser components
- Water cooled heatsinks
- Power electronics
- Aerospace, medical and semiconductor components
HMAN1000S 170 W/mK is our standard high thermal conductivity substrate material, However, other high-performance grades are also available.
HMAN1000S Applications:
- Heat sinks
- Heat spreaders
- Laser heatsinks power rectifiers
- Aerospace, power electronics, rectifiers
HMAN2000 is one of our enhanced grades of aluminium nitride, offering all the mechanical performance of HMAN1000 with the enhanced benefits of 200 W/mK thermal conductance.
HMAN2000 Applications:
- Heat sinks
- Heat spreaders
- Laser heatsinks power rectifiers
- Aerospace, power electronics, rectifiers
HMAN3000 is one of our enhanced grades of aluminium nitride offering, all the mechanical performance of HMAN1000 with the enhanced benefits of 230 W/mK thermal conductance.
HMAN3000 Applications:
- Heat sinks
- Heat spreaders
- Laser heatsinks power rectifiers
- Aerospace, power electronics, rectifiers
HMAN4000 is one of our enhanced grades of aluminium nitride offering, all the mechanical performance of HMAN1000 with the enhanced benefits of 200 W/mK thermal conductance.
HMAN4000 Applications:
- Heat sinks
- Heat spreaders
- Laser heatsinks power rectifiers
- Aerospace, power electronics, rectifiers
Aluminum Nitride Ceramic Machining
Aluminum Nitride (AlN) ceramic machining is a precise process used to fabricate high-performance components from aluminum nitride materials. Machining aluminum nitride ceramics requires specialized equipment and techniques to handle their brittleness and hardness. Proper tooling and controlled environments are essential to avoid material damage and achieve the desired surface finish and dimensional accuracy. The common machining methods are as follows:
- Diamond Cutting: Diamond tools are used to achieve fine precision and smooth surface finishes, ideal for complex shapes.
- Laser Cutting: A non-contact method used for intricate shapes, with high precision and minimal thermal impact.
- Precision Grinding: Utilized to achieve fine tolerances and surface finishes. Requires special care to prevent cracking or chipping due to the ceramic’s brittleness.
- Wire EDM (Electrical Discharge Machining): A method often used for intricate cutting, especially for thin and complex geometries.
Aluminum Nitride Ceramic Packaging
Aluminum Nitride Ceramic products are typically packaged in vacuum-sealed bags to prevent moisture or contamination and wrapped with foam to cushion vibrations and impacts during transport, ensuring the quality of products in their original condition.
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